Ph.D., Laser Physics, B.S., Physics, University of New England, New South Wales, Australia
Technology Development ASML
Daniel Brown, Ph.D., is Vice President of Technology Development since completion
of Cymer’s merger with ASML Holding, Ltd., in May 2013. Brown served as Vice President
and Technology Development Officer for Cymer, Inc. from 2010-2013. Prior to 2010 he
held the positions of Vice President, Technology Development and Vice President, Engineering
within the Deep-Ultraviolet Product Group at Cymer. Brown is chartered with overseeing
the technology activities for the company’s EUV light source development and deep-ultraviolet
light source products to meet the demands of the semiconductor marketplace.
Prior to joining Cymer in 2000, Brown served for over 11 years in various Australian
Research Council Fellow positions at Macquarie University (located in Sydney, Australia)
including Australian Senior Research Fellow and Australian Research Fellow, responsible
for development of novel high-power ultraviolet laser sources based on nonlinear frequency
conversion of high-pulse-rate laser systems. Dr. Brown holds a Doctorate degree in
Physics and a Bachelor’s degree in Science from the University of New England in Australia.
- College of Engineering – Advisory Board